Flexible, highly sensitive and reliable piezocapacitive pressure sensor with honeycomb-like microarchitecture fabricated using filament-processed mold

摘要

Abstract Highly sensitive flexible pressure sensors have been extensively studied due to their promising applications in many fields. Various sensing mechanisms have been proposed to convert pressure into a readable electrical signal, among which piezocapacitive presents advantages due to its simple structure and convenient integration. The modification of the dielectric layer composing these sensors is a common strategy to improve their sensing performance. In this paper, we propose the fabrication of a novel capacitive-based flexible pressure sensor with honeycomb-like microarchitecture by using femtosecond laser filament based far-field technique. The fabricated flexible sensing device is assembled face-to-face with two layers of micro-structured polydimethylsiloxane thin films that is duplicated from laser filament-processed silicon mold. The as-prepared flexible sensor features excellent sensing performance with high reliability, and enables detection of multi-modal signals, including pressure, proximity, and bending. Owing to the advantages mentioned above, the obtained flexible pressure sensor can be attached on non-planar human skin to monitor the physiological signals as well as joint deformation during exercise, revealing it great application potential in cutting-edge fields, such as robotic tactility.