Flexible planar Hall effect sensor with sub-200 pT resolution

摘要

Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/Hz. The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.