OTHER
Feedforward compensation of the pose-dependent vibration of a silicon wafer handling robot
Cheng-Hao Chou, Chen Qian, Yung-Chun Lin, Shorya Awtar, Chinedum E. Okwudire
- 发表年份
- 2024
- 引用次数
- 4
关键词
WaferFeed forwardCompensation (psychology)VibrationRobotSiliconComputer scienceMechanical engineeringEngineeringMaterials science
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