Robotic dual probe setup for reliable pick and place processing on the nanoscale using haptic devices

摘要

This paper presents reproducible pick and place handling of particles within the sub micron range. The handling strategy is based on a robotic dual probe setup that is integrated into a high resolution scanning electron microscope. By purposeful utilization of the predominant adhesive forces on the nanoscale, this setup facilitates the assembly of overall complex arrangements of different nanoparticles using haptic devices. The paper discusses control issues of the setup as well as the advantages and restrictions of the proposed technique.