OTHER
Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot
Xingliang Bao, Thomas Dargent, Sébastien Grondel, J Paquet, Éric Cattan
- 发表年份
- 2011
- 引用次数
- 24
关键词
Surface micromachiningMaterials scienceNanotechnology
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