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Thin-film piezoelectric and high-aspect ratio polymer leg mechanisms for millimeter-scale robotics

Jongsoo Choi, Minchul Shin, Ryan Q. Rudy, Christopher Kao, Jeffrey S. Pulskamp, Ronald G. Polcawich, Kenn R. Oldham

发表年份
2017
引用次数
26

关键词

Materials scienceActuatorRobotLead zirconate titanatePiezoelectricityUnimorphAcousticsWaferCantileverComputer science

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