Self‐Powered Flexible Sensor Array for Dynamic Pressure Monitoring

摘要

Abstract Flexible pressure sensors are valuable in applications such as electronic skin, smart robots, artificial prosthetics, and wearable electronics. In this study, a fully packaged, flexible, self‐powered, long‐term stable sensor array based on piezoelectrets is developed for pressure monitoring. A pressure sensor with a microcavity structure and a thickness of 500 µm achieved an impressive piezoelectric coefficient of 23.8 pC N −1 and a fast response time of 93 ms. The sensor yielded an output voltage of 0.26 V when subjected to a force using 0.3 g soybeans, and it displayed a remarkable linear relationship (R 2 = 0.992) between force and electricity with pressure ranging from 1.4 to 13.6 N and a sensitivity of 9 mV N −1 . Real‐time monitoring of sound vibration, radial artery pulse, and finger movement is demonstrated along with the successful recording of dynamic pressure changes within the porcine knee joint. It holds potential for fields such as monitoring pressure changes in the movement of human bodies and robotics and can contribute significantly to pressure assessment during total knee replacement.