T. Kobata
Papers
2
Total Citations
13
H-Index
2
About
T. Kobata is a pioneering researcher in the field of microelectromechanical systems (MEMS) and micro-manufacturing, with a focus on the mechanical construction and assembly of three-dimensional microstructures. Their major contributions lie in the development of innovative fabrication techniques that enable the creation of complex 3-D micro devices, moving beyond traditional planar methods. Notably, Kobata introduced the "multi-face FAB (fast atom beam)" method, which uses a non-contact mask and intermittent workpiece rotation to perform pattern-etching on multiple faces, allowing for true 3-D shape construction. This work, detailed in their 2002 paper (7 citations), was complemented by earlier foundational research on integrating 3-D shape construction with assembly processes to realize complete micro systems (1995, 6 citations). While their citation counts are modest, reflecting a niche and highly specialized area, Kobata’s contributions are significant for advancing mechanical tools—such as co-focus rotational robots—that bridge the gap between macro-scale robotics and micro-scale fabrication. Their achievements highlight a unique mechanical engineering approach to MEMS, offering practical pathways for manufacturing intricate microstructures used in sensors, actuators, and medical devices.
Research Focus
Key Achievements
Top Papers
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- 2