MEMS-based fabrication of multiple-degree-of-freedom ionic polymer-metal composite actuators

Abstract

Ionic polymer-metal composites (IPMC) are soft actuation materials with promising applications in robotics and biomedical devices. In this paper, a MEMS-based approach is presented for monolithic, batch fabrication of IPMC pectoral fin actuators that are capable of complex deformation. Such an actuator consists of multiple, individually controlled IPMC regions that are mechanically coupled through compliant, passive regions. Prototypes of artificial pectoral fins have been fabricated with the proposed method, and sophisticated deformation modes, including bending, twisting, and cupping, have been demonstrated, which shows the promise of the pectoral fin in robotic fish applications.