CMOS-Based Capacitive Sensor Array Dedicated to Microfluidic Studies

Abstract

We present a novel technique to study the behavior of liquids in microfluidics. An array of capacitive sensors realized in CMOS circuitry is considered to detect the liquid in a channel integrated on top of CMOS chip. A microfluidic packaging procedure is described using a robotic-based fabrication process and the preliminary experimental results are reported. Also, the capacitive simulation results are displayed using finite-element based software.