Home /Research /A14-093 DEVELOPMENT OF MEMS COMPONENT ASSEMBLY MACHINE : APPLICATION OF ROBOTICS TECHNOLOGY TO MICROMECHATRONICS
OTHER

A14-093 DEVELOPMENT OF MEMS COMPONENT ASSEMBLY MACHINE : APPLICATION OF ROBOTICS TECHNOLOGY TO MICROMECHATRONICS

Akihiro Matsumoto, Toshinari AKIMOTO, Kunio Yoshida, Hiroki Inoue, Kenichi Kamijo

Year
2003
Citations
6

Keywords

RoboticsComponent (thermodynamics)Artificial intelligenceMicroelectromechanical systemsManufacturing engineeringEngineeringComputer scienceRobotNanotechnologyMaterials science

Related papers

Browse all OTHER papers