OTHER
A14-093 DEVELOPMENT OF MEMS COMPONENT ASSEMBLY MACHINE : APPLICATION OF ROBOTICS TECHNOLOGY TO MICROMECHATRONICS
Akihiro Matsumoto, Toshinari AKIMOTO, Kunio Yoshida, Hiroki Inoue, Kenichi Kamijo
- 发表年份
- 2003
- 引用次数
- 6
关键词
RoboticsComponent (thermodynamics)Artificial intelligenceMicroelectromechanical systemsManufacturing engineeringEngineeringComputer scienceRobotNanotechnologyMaterials science
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