Home /Research /Surface ESD (ESDFOS) in assembly fab machineries as a functional and reliability risk – Failure analysis, tool diagnosis and on-site-remedies
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Surface ESD (ESDFOS) in assembly fab machineries as a functional and reliability risk – Failure analysis, tool diagnosis and on-site-remedies

Peter Jacob

Year
2008
Citations
6

Keywords

Electrostatic dischargeWafer dicingReliability (semiconductor)WaferPassivationMechanical engineeringElectrostaticsEngineeringMaterials scienceReliability engineering

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