OTHER
Surface ESD (ESDFOS) in assembly fab machineries as a functional and reliability risk – Failure analysis, tool diagnosis and on-site-remedies
Peter Jacob
- 发表年份
- 2008
- 引用次数
- 6
关键词
Electrostatic dischargeWafer dicingReliability (semiconductor)WaferPassivationMechanical engineeringElectrostaticsEngineeringMaterials scienceReliability engineering
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