OTHER
Characterization and modeling of a piezoresistive three-axial force micro sensor
Nouha Alcheikh, C. Coutier, S. Giroud, Christophe Poulain, Patrice Rey
- Year
- 2013
- Citations
- 10
Keywords
Piezoresistive effectFootprintFinite element methodLinearityFabricationMaterials scienceCharacterization (materials science)HysteresisSensitivity (control systems)Microelectromechanical systems
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