Building Micro-Robots: A path to sub-mm 3 autonomous systems

Abstract

A process for realizing sub-cubic millimeter microrobots is detailed. To date, the process has been used to produce spherical structures ranging from 0.5 mm to 3.0 mm in diameter. A model of a 0.7 mm diameter spherical robot has been developed and an estimated power budget is provided. In addition, a model of the electrostatic actuators that will be used for the robot is covered. This model has been verified through experiments using external actuators.