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Issues in precision motion control and microhandling

Hannes Bleuler, Reymond Clavel, J.‐M. Breguet, H.H. Langen, Eric Pernette

Year
2002
Citations
34

Abstract

Illustrates with various practical examples an activity at the intersection of MEMS, system control, robotics and ultraprecision design. The resulting new application domains include microrobotics, microfactories and nanotechnologies.

Keywords

Intersection (aeronautics)RoboticsMotion controlArtificial intelligenceComputer scienceControl engineeringMotion (physics)Microelectromechanical systemsControl (management)Engineering

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