OTHER
Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system
Ri Pan, Wanying Zhao, Zhenzhong Wang, Shuting Ji, Xiangsheng Gao, Dongju Chen, Jinwei Fan
- Year
- 2021
- Citations
- 35
Keywords
StiffnessPolishingStiffness matrixMaterials scienceFoundation (evidence)Structural engineeringDirect stiffness methodMechanical engineeringProcess (computing)Chemical-mechanical planarization
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