<title>NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements</title>

Abstract

The aim of this project is to develop the smallest and most sophisticated wireless fully autonomous instrumented robot capable of subatomic movements. The robot named 'NanoWalker' should bring a new paradigm in the way instruments are built while providing a sophisticated platform for a new range of applications. The project involves primarily the investigation of a new legged locomotion based on piezo-actuators with advanced micro-assembly techniques applied to complex embedded electronic systems; the development of new miniature instruments, micro-manipulators, integrated behavior for controlling, searching and scanning at the atomic scale; and the development of a subatomic navigation system. Besides all the new technologies and techniques that we intend to develop and which will be applicable to many areas and systems, the NanoWalker should provide a suitable yet more flexible and powerful platform compared to traditional macro-scaled instruments. It is anticipated that this new form of highly integrated autonomous microsystem will be used as the main building block for a new generation of measurement and inspection systems. In this paper, the main components of the NanoWalker are briefly described.