OTHER
Nanometer precision positioning robots utilizing optimized scratch drive actuators
R. Linderman, Victor M. Bright
- Year
- 2001
- Citations
- 39
Keywords
RobotWaferChipActuatorMaterials scienceScratchProcess (computing)FabricationComputer scienceNanometre
Related papers
OTHER
📊 26,957 cites
Statistical Learning Theory
Yuhai Wu, Vladimir Vapnik
1999
PERCEPTION
📊 22,245 cites
Artificial intelligence: a modern approach
1995
OTHER
Open access📊 20,501 cites
Fractional Differential Equations
Igor Podlubný
2025
OTHER
📊 18,993 cites
Applied Nonlinear Control
Jean-Jacques Slotine, Weiping Li
1991