MANIPULATION
A review on actuation and sensing techniques for MEMS-based microgrippers
Sijie Yang, Qingsong Xu
- Year
- 2017
- Citations
- 166
Keywords
MiniaturizationMicroelectromechanical systemsActuatorCapacitive sensingFlexibility (engineering)Piezoresistive effectPrecision engineeringMechanical engineeringMaterials scienceElectrical engineering
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