Robot Leg Motion in a Planarized-SOI, 2 Poly Process

摘要

With the ultimate goal of creating autonomous microrobots, we have developed a new five-mask process that combines two polysilicon structural layers with 35 m thick SOI structures and a backside substrate etch. The polysilicon layers provide 3D hinged structures, high compliance structures, and electrical wiring. The SOI structural layer yields much stronger structures and large-force actuators. On an 8mm x 3mm robot, we have demonstrated polysilicon hinges with SOI electrostatic inchworm motors.