Flexible Micro-Nano Fiber Sensors for Tactile Sensing

摘要

Flexible tactile sensors play an important role in wearable devices, human–computer interaction devices, and advanced robotics. We propose a novel structure of bionic flexible tactile sensor. The micro-nano fibers (MNFs) are packed in a 10- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> film on a polydimethylsiloxane (PDMS) base, forming a thin film-MNF-PDMS structure. A ridge-shaped sensing region is formed on the surface of the PDMS substrate. The MNF is so close to the sensor surface that vibration and pressure signals can act directly on the MNF. Compared to existing MNF flexible sensors, this sensor has higher sensitivity and faster response time. We tested the response of the flexible sensor to vibration and temperature. This sensor can measure vibration signals from 0.1 Hz to 2 kHz. The sensitivity of this sensor to temperature can reach 1.43 nm/°C. Surfaces with different roughness or texture can be distinguished by sliding on the sensor surface. The structural and functional characteristics of this sensor are desirable in flexible bionic devices and advanced robots.