Polysilicon Thin Film Developed on Flexible Polyimide for Biomedical Applications

摘要

Flexible pressure and thermal sensors are the critical parts of the functional electronic skin of prostheses and robots, as well as flexible catheter/devices for multimodal biomedical monitoring. In this paper, a polysilicon thin film was developed on a flexible polyimide substrate using aluminum induced crystallization process for biomedical pressure and temperature sensing applications. The formation of polycrystalline structure was verified from the developed polysilicon film. Long term stability and real-time temperature tests were performed to evaluate potential application to the <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">in vivo</i> monitoring of brain or body temperature. The linear real-time change of polysilicon resistance with temperature was attained with the temperature coefficient of the resistance of −0.0027/°C and the resolution of 0.05 °C. With a gauge factor of 10.3, the polysilicon film developed in this paper represents a promising material for the development of high-sensitivity pressure sensors on flexible polyimide substrates. [2015-0106]