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Implementation of self-sensing SPM cantilevers for nano-force measurement in microrobotics

Stephan Fahlbusch, Sergej Fatikow

发表年份
2001
引用次数
19

关键词

CantileverGrippersPiezoresistive effectNanotechnologyRobotStrain gaugeNano-MicrosystemComputer scienceMechanical engineering

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