OTHER
Review of MEMS flow sensors based on artificial hair cell sensor
Mohd Norzaidi Mat Nawi, Asrulnizam Abd Manaf, Mohd Rizal Arshad, Othman Sidek
- 发表年份
- 2011
- 引用次数
- 23
关键词
Microelectromechanical systemsResistorGliderStrain gaugeComputer scienceFabricationMechanical engineeringSystems engineeringElectronic engineeringEngineering
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