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Investigation on the polishing of aspheric surfaces with a doughnut-shaped magnetic compound fluid (MCF) tool using an industrial robot

Ming Feng, Yongbo Wu, Youliang Wang, Jiang Zeng, Teruo Bitoh, Mitsuyoshi Nomura, Tatsuya Fujii

发表年份
2019
引用次数
23

关键词

PolishingMaterials scienceSurface roughnessAbrasiveAlloyConic sectionSlurrySurface finishChemical-mechanical planarizationEngineering drawing

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