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Investigation on the polishing of aspheric surfaces with a doughnut-shaped magnetic compound fluid (MCF) tool using an industrial robot

Ming Feng, Yongbo Wu, Youliang Wang, Jiang Zeng, Teruo Bitoh, Mitsuyoshi Nomura, Tatsuya Fujii

Year
2019
Citations
23

Keywords

PolishingMaterials scienceSurface roughnessAbrasiveAlloyConic sectionSlurrySurface finishChemical-mechanical planarizationEngineering drawing

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