Flexible capacitive sensors for high resolution pressure measurement

摘要

Thin, flexible, robust capacitive pressure sensors have been the subject of research in many fields where axial strain sensing with high spatial resolution and pressure resolution is desirable for small loads, such as tactile robotics and biomechanics. Simple capacitive pressure sensors have been designed and implemented on flexible substrates in general agreement with performance predicted by an analytical model. Two designs are demonstrated for comparison. The first design uses standard flex circuit technology, and the second design uses photolithography techniques to fabricate capacitive sensors with higher spatial and higher pressure resolution. Sensor arrays of varying sensor size and spacing are tested with applied loads from 0 to 1 MPa. Pressure resolution and linearity of the sensors are significantly improved with the miniaturized, custom fabricated sensor array compared to standard flexible circuit technology.