Optical proximity correction

Related papers: 1

Top Researchers

Keith Best

Institution: —

Mike Marshall

Institution: —

Top Cited Papers

Advanced Packaging Metrology And Lithography That Overcomes FOWLP/FOPLP Die Placement Error

Keith Best, Mike Marshall

Citations: 5 • 2018

Related Technologies

Computer science Process (computing)Engineering Electrical engineering Metrology Optics Mechanical engineering Nanotechnology Materials science Optoelectronics