Optical proximity correction

相关论文数: 1

顶级研究者

Keith Best

研究机构: —

Mike Marshall

研究机构: —

最高引用论文

Advanced Packaging Metrology And Lithography That Overcomes FOWLP/FOPLP Die Placement Error

Keith Best, Mike Marshall

引用数: 5 • 2018

相关技术

Computer scienceProcess (computing)EngineeringElectrical engineeringMetrologyOpticsMechanical engineeringNanotechnologyMaterials scienceOptoelectronics