Nanolithography

Related papers: 20

Top Cited Papers

Autonomous robotic nanofabrication with reinforcement learning

Citations: 72 • 2020

Autonomous robotic nanofabrication with reinforcement learning

Philipp Leinen, Malte Esders, Kristof T. Schütt, Christian Wagner, Klaus‐Robert Müller

Citations: 69 • 2020

3D electron-beam writing at sub-15 nm resolution using spider silk as a resist

Nan Qin, Zhi‐Gang Qian, Chengzhe Zhou, Xiao‐Xia Xia, Tiger H. Tao

Citations: 60 • 2021

Mechanically Guided Hierarchical Assembly of 3D Mesostructures

Hangbo Zhao, Xu Cheng, Changsheng Wu, Tzu‐Li Liu, Qinai Zhao, Shuo Li, Xinchen Ni, Shenglian Yao, Mengdi Han, Yonggang Huang, Yihui Zhang, John A. Rogers

Citations: 41 • 2022

Photoactuated Pens for Molecular Printing

Zhongjie Huang, Le Li, Xu A. Zhang, Nourin Alsharif, Xiaojian Wu, Zhiwei Peng, Xiyuan Cheng, Peng Wang, Keith A. Brown, YuHuang Wang

Citations: 35 • 2017

Additive Manufacturing of Nanostructures That Are Delicate, Complex, and Smaller than Ever

Andrew J. Gross, Katia Bertoldi

Citations: 34 • 2019

Light-driven transport of plasmonic nanoparticles on demand

José A. Rodrigo, Tatiana Alieva

Citations: 26 • 2016

Fabrication and control of simple low Reynolds number microswimmers

U Kei Cheang, Min Jun Kim

Citations: 25 • 2016

3D Nanofabrication via Directed Material Assembly: Mechanism, Method, and Future

Songyun Gu, Bingxu Chen, Xiayi Xu, Fei Han, Shih‐Chi Chen

Citations: 21 • 2024

Micropatterning of polystyrene nanoparticles and its bioapplications

Chun Wang, Fung Ling Yap, Yong Zhang

Citations: 20 • 2005

Optical Orbital Angular Momentum Read-Out Using a Self-Assembled Plasmonic Nanowire

Deepak K. Sharma, Vijay Kumar, Adarsh B. Vasista, Diptabrata Paul, Shailendra K. Chaubey, G. V. Pavan Kumar

Citations: 18 • 2018

Freeform Fabrication of Pneumatic Soft Robots via Multi‐Material Jointed Direct Ink Writing

Zhenhua Wang, Boyu Zhang, Weicheng Cui, Nan Zhou

Citations: 16 • 2022

One-Dimensional Nanoprobes for Single-Cell Studies

Yang Gao, Travis Longenbach, Elina A. Vitol, Zulfiya Orynbayeva, Gary Friedman, Yury Gogotsi

Citations: 15 • 2013

Massively Parallel Nanorobotics for Lithography and Data Storage

Aristides A. G. Requicha

Citations: 15 • 1999

Localized Photoactuation of Polymer Pens for Nanolithography

Zhongjie Huang, Shaopeng Li, Jiaqi Zhang, Huan Pang, Andrey Ivankin, YuHuang Wang

Citations: 14 • 2023

A sub-micron metallic electrothermal gripper

Daniel Sang-Won Park, Arun K. Nallani, DonKyu Cha, Gil-Sik Lee, Moon J. Kim, George D. Skidmore, Jeong‐Bong Lee

Citations: 12 • 2009

Design of Elastomer-CNT Film Photoactuators for Nanolithography

Le Li, Zhongjie Huang, YuHuang Wang, Keith A. Brown

Citations: 11 • 2019

Large area micro-/nano-structuring using direct laser interference patterning

Andrés Fabián Lasagni, Tim Kunze, Matthias Bieda, Denise Günther, Anne Gärtner, Valentin Lang, Andreas Rank, Teja Roch

Citations: 11 • 2016

Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures

Lixin Dong, Li Zhang, Dominik J. Bell, Bradley J. Nelson, Detlev Grützmacher

Citations: 10 • 2006

Design of a micro-cartridge system for the robotic assembly of exchangeable AFM-probe tips

Malte Bartenwerfer, Volkmar Eichhorn, Sergej Fatikow, Marco Becker, Alexey Savenko, Izzet Yildiz, Peter Bøggild

Citations: 7 • 2013