Takeshi Yamauchi
Papers
2
Total Citations
4
H-Index
2
About
Dr. Takeshi Yamauchi’s research career bridges two distinct and impactful fields: advanced semiconductor manufacturing and robotic systems for construction. In semiconductor processing, he made significant contributions to plasma ashing technology. His 1999 paper on a microwave-excited plasma asher using a slot antenna for 300-mm wafers achieved an ashing rate of 4.5 µm/min with excellent uniformity of ±5.1% at 250°C, a critical advancement for next-generation wafer fabrication. This work, though highly specialized, has been cited 2 times and laid groundwork for high-throughput, uniform plasma processing. In parallel, Dr. Yamauchi pioneered tele-operated robotics for construction machinery. His 2004 paper on a robot mountable to general-purpose construction machines (2 citations) demonstrated a practical system for remote operation, enhancing safety and precision in hazardous environments. By merging robotics with heavy equipment, he addressed real-world challenges in infrastructure and disaster response. Though his citation counts are modest, Dr. Yamauchi’s dual contributions reflect a career dedicated to solving practical engineering problems—from nanoscale wafer uniformity to large-scale robotic control—showcasing versatility and applied innovation.
Research Focus
Key Achievements
Top Papers
- 1
- 2Plasma ashing using microwaves via slot antenna for 300-mm wafers2 citations · 1999