Guobao Xu
Papers
1
Total Citations
3
H-Index
1
About
Guobao Xu is a researcher specializing in precision motion control and vibration suppression within semiconductor manufacturing systems. His work addresses critical challenges in Integrated Circuit (IC) equipment, particularly the dynamic stability of wafer transfer robots. As these robots operate at higher speeds to boost throughput, the resulting forces induce frame vibrations that compromise positioning accuracy and equipment reliability. Xu's most-cited paper, "Frame vibration suppression for wafer transfer system" (2011), proposes targeted control strategies to mitigate these oscillations, directly contributing to the efficiency and precision of automated wafer handling. Though his citation count is modest, his research holds practical significance for the IC manufacturing industry, where even minor vibrations can lead to costly defects. Xu's focus on the intersection of mechanical dynamics and control engineering underscores his role in advancing the robustness of high-speed automation systems, a key enabler for next-generation semiconductor fabrication.
Research Focus
Key Achievements
Top Papers
- 1Frame vibration suppression for wafer transfer system3 citations · 2011