B. Amundsen

Papers

Total Citations

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About

B. Amundsen is a leading figure in the field of ion implantation technology, with a focused expertise in the production of silicon-on-insulator (SOI) materials, particularly Separation by IMplantation of OXygen (SIMOX) wafers. His most significant contribution is the development and refinement of the Ibis 1000 production implanter, a critical tool for manufacturing high-quality SIMOX wafers. Amundsen’s work on the second-generation Ibis 1000, detailed in his 2002 paper (cited 3 times), enabled the reliable production of 150 mm and 200 mm SIMOX wafers with exceptional implant uniformity and repeatability. This advancement was pivotal for the semiconductor industry, as it allowed for the commercial-scale fabrication of SOI wafers, which are essential for reducing parasitic capacitance and improving device performance in advanced integrated circuits. The system’s innovative design, including a newly developed ion source and analyzer, set a new standard for production efficiency. While his citation count is modest, Amundsen’s impact is deeply embedded in the manufacturing processes that underpin modern microelectronics, making him a key contributor to the practical realization of SOI technology.