OTHER
Mechanically scanned ion implanters with two-axis disk tilt capability
T. Tamai, Michael P. Diamond, Brenda Doherty, P. Splinter
- Year
- 1991
- Citations
- 6
Keywords
GimbalWaferTilt (camera)Lock (firearm)Materials scienceProcess (computing)Ion implantationMechanical engineeringEngineeringComputer science
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