Sputtering

Thin-Film Amorphous Silicon Position-Sensitive Detectors

J. Henry, J. Livingstone

Citations: 115 • 2001

Optoelectronic artificial synapses based on β-Ga2O3 films by RF magnetron sputtering

Xinrong Chen, Wei Mi, Meng Li, Jinze Tang, Jinshi Zhao, Liwei Zhou, Xingcheng Zhang, Chongbiao Luan

Citations: 53 • 2021

Gold/Polyimide-Based Resistive Strain Sensors

Tao Han, Anindya Nag, Nasrin Afsarimanesh, Fowzia Akhter, Hangrui Liu, Samta Sapra, Subhas Chandra Mukhopadhyay, Yongzhao Xu

Citations: 47 • 2019

Combinatorial thin film composition mapping using three dimensional deposition profiles

Santosh K. Suram, Lan Zhou, Natalie Becerra-Stasiewicz, Kevin Kan, Ryan J. R. Jones, Brian M. Kendrick, John M. Gregoire

Citations: 38 • 2015

Shape memory NiTi thin films deposited on polyimide at low temperature

Venkata Girish Kotnur, F.D. Tichelaar, W.T. Fu, J. Th. M. De Hosson, G. C. A. M. Janssen

Citations: 33 • 2014

A new highly automated sputter equipment for <i>in situ</i> investigation of deposition processes with synchrotron radiation

Ralph Döhrmann, Stephan Botta, Adeline Buffet, Gonzalo Santoro, Kai Schlage, Matthias Schwartzkopf, Sebastian Bommel, Johannes F. H. Risch, Roman Mannweiler, Simon Brunner, Ezzeldin Metwalli, Peter Müller‐Buschbaum, Stephan V. Roth

Citations: 30 • 2013

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Jean‐Yves Rauch, Olivier Lehmann, Patrick Rougeot, Joël Abadie, Joël Agnus, Miguel Ángel Suárez

Citations: 24 • 2018

Shape memory thin films formed with carrousel-type magnetron sputtering apparatus

Akira Ishida, Morio Sato, Osamu Tabata, W. Yoshikawa

Citations: 17 • 2005

Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge

Akihiko Itoh, Toshiaki Makabe, N. Shimura, S. Tougo

Citations: 17 • 1996

Study on the characteristics of thermo-electrodes of various deposition parameters for the flexible temperature sensor

Zhaojun Liu, Bian Tian, Fan Xu, Zhongkai Zhang, Jiangjiang Liu, Qijing Lin, Peng Shi, Feng Han, Qi Mao, Zhuangde Jiang

Citations: 14 • 2020

Transparent Zinc Oxide Memristor Structures: Magnetron Sputtering of Thin Films, Resistive Switching Investigation, and Crossbar Array Fabrication

A. V. Saenko, R V Tominov, I L Jityaev, Zakhar Vakulov, V I Avilov, Nikita V. Polupanov, V. A. Smirnov

Citations: 11 • 2024

NiB-CrC Coatings Prepared by Magnetron Sputtering Using Composite Ceramic NiCr-BC Target Produced by Detonation Spray Coating

В. В. Сирота, Д. С. Прохоренков, M. V. Limarenko, A. A. Skiba, М. Г. Ковалева

Citations: 11 • 2022

High-speed Gas Sensing using Localized Surface Plasmon Resonance of Sputtered Noble Metal Nanoparticles

Bin Chen, Manami Ota, Masami Mokume, Chuanjun Liu, Kenshi Hayashi

Citations: 11 • 2013

Transparent Conducting Films in the Zn--Sn--O Tie Line

A. Kurz, Michel A. Aegerter

Citations: 8 • 2004

Alleviation of honeycomb print-through of NiP/Cu coated carbon fiber composite mirror via robot-arm wheel polishing

Yong-jie Wang, Yongsheng Yao, Liang Xu, Xiaoge Wu, Le Shen, Guoyan Sun

Citations: 7 • 2022

Ion Beam Figuring System for Ultra-Precise Optics

Zheng Yuan, Yi Dai, Xu Hui Xie, Lin Zhou

Citations: 7 • 2012

Transparent conducting films in the Zn-Sn-O tie line

A. Kurz, Michel A. Aegerter

Citations: 7 • 2004

Vibration Sensors on Flexible Substrates Based on Nanoparticle Films Grown by Physical Vapor Deposition

Evangelos Aslanidis, Savvas Sarigiannidis, Evangelos Skotadis, Dimitris Tsoukalas

Citations: 6 • 2024

Magnetron Sputtering Coating of Protective Fabric Study on Influence of Thermal Properties

Yunqi Zhai, Xiaoxia Liu, Xiao Li

Citations: 6 • 2015

Research on a sixaxis force/torque sensor based on thin film sputtering technology and its decoupling for space robot

Jingjing Xu, Aiguo Song, Yu-Han Chen, Wenyan Qu

Citations: 5 • 2025