OTHER
Study on optimization of the dynamic performance of the robot bonnet polishing system
Ri Pan, Chunfu Hu, Jinwei Fan, Zhenzhong Wang, Xuepeng Huang, Feng Lu
- Year
- 2023
- Citations
- 4
Keywords
PolishingVibrationMachiningModal analysisNatural frequencyModalControl theory (sociology)Chemical-mechanical planarizationEngineeringStructural engineering
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