Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators

Abstract

An important aspect that must be considered when designing micro-electro-mechanical systems (MEMS) for all domains, including robotics, is the thermoelastic damping which occurs when the MEMS material is subjected to cyclic stress. This paper is focused on a model for the thermoelastic damping developed based on the generalized thermoelastic theory with the non-Fourier thermal conduction equation. The model was implemented in MATLAB and several simulations were performed. The theoretical results show a decrease in the deflection amplitude with the increase in time. The deflection amplitude decrease was validated by the experimental investigations, consisting of measuring the loss in amplitude and velocity of oscillations as a function of time. Moreover, this paper also presents the influence of the geometric dimensions on the mentioned decrease, as well as on the initial and final values of the amplitude for several polysilicon resonators investigated in this paper.