Brooks Automation expands control capability of precision industrial robots

Abstract

Increasing complexity and aggressive throughput performance of precision robotic manipulators for semiconductor and flat‐panel‐display manufacturing applications require innovative control system architectures and advanced trajectory planning and motion control techniques. Brooks Automation, a global supplier of integrated automation solutions for the semiconductor and flat‐panel‐display manufacturing industries, has developed a number of advances that accelerate technological development in these areas of robot control in an effort to set new industry standards in performance and reliability.