Nanorobotics for creating NEMS from 3D helical nanostructures

Abstract

Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from 3D SiGe/Si/Cr and Si/Cr nanostructures is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.