Applications of MEMS to industrial inspection

Abstract

The applications of MEMS, micromachines or micro robots, to industrial inspections are investigated. Applications are classified by their uses and forms. The necessity of MEMS is also described. Present research activities regarding maintenance area are surveyed, and a chain-type micromachine for the inspection of outer tube surfaces is introduced as an example. There are still a lot of problems for practical use, however, although there are lots of potential uses. Industrial inspection applications are expected to be one of the promising applications of MEMS followed by optical, RF, and power applications.