Multi degree of freedom spherical ultrasonic motor

Abstract

This paper presents a multidegree of freedom spherical ultrasonic motor. As a prototypical spherical ultrasonic motor, we have successfully developed two kinds of spherical ultrasonic motor with two degree of freedom. Each type has good controllability; the motor can drive a spherical rotor about an arbitrary axis; the maximum speed is 30 rpm; the maximum output torque is 0.7 kg cm; the maximum positioning error is 0.3 mm. It is expected to be applied to not only robotic manipulator's actuator but also assembling machine, laser cutting and many fields.