OTHER
A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication
Yang Ge, J. A. Gaines, Bradley J. Nelson
- Year
- 2003
- Citations
- 98
Keywords
WorkcellMicroelectromechanical systemsMicroscale chemistryMicrofabricationDeep reactive-ion etchingWaferFabricationRoboticsEngineeringMechanical engineering
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