Piezoelectric Single Crystal-based Nano-scale Actuator and Its Amplifying Mechanism

摘要

Actuator is the key technology of the micro-nano robots and operations. The piezoelectric single crystal is a new choice compared with the traditional piezoelectric ceramic actuator. The paper designed a set of performance test device to measure PZN-5.5% PT single crystal actuator's characteristics. The actuator show the good linearity and negligible hysteresis, which can reduce the complex of the system and improve the response speed. The paper also developed a flexible hinge amplifying mechanism to improve the range of the displacement. An adjustable spring mechanism was optimally developed for pre-load to achieve negative displacement response. Subsequently the simulated and mathematical magnification ratio was compared with experimental data. And the mechanism was measured. The steady and accurate outputs of the system validated that the amplifying mechanism can amplify the input displacement at voltage drive.