SOLIDWORKS ADD-IN FOR MOTION SIMULATION, LAYOUT ANALYSISAND COLLISION DETECTION OF SUBSTRATE HANDLING ROBOTS

摘要

The paper is dedicated to the implementation of a tool for motion simulation, layout analysis, and collision detection of substrate handling robots in the form of an add-in for SolidWorks. The main goal is developing a system that allows the direct usage of standard SolidWorks robot 3D models for simulation, offline programming, analysis, and optimization of automated cells, applicable in the field of semiconductor device manufacturing. The resultant system allows the simultaneous execution of de-sign, simulation, and evaluation activities, based on a single software platform, thus increasing productivity, saving time, and reducing costs. The proposed add-in concept contributes to achieving a much more integrated appearance and behavior of the tool, enhancing its functionality, and eliminating issues associated with reliability and security.