OTHER
Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes
Haoran Wen
- 发表年份
- 2019
- 引用次数
- 3
关键词
GyroscopeMicroelectromechanical systemsInertial frame of referencePhysicsChipScalingDegree (music)EngineeringElectrical engineeringOptoelectronics
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