Direct-Write Fabrication of Microchannel in Epoxy Matrix

摘要

This paper describes the fabrication of microchannels by direct-write assembly and their integration into CMOS circuit technologies. A robotic apparatus was used to deposit a fugitive ink filament on glass and CMOS chip substrates. An epoxy and a nanocomposite matrix were both used to enclose the ink which was subsequently removed under heat and pressure in order to form a microchannel. Here, we demonstrate the fabrication of a microchannel by direct-write assembly on top of a CMOS chip for potential laboratory-on-chip applications such as bioparticle detection and manipulation.