OTHER
Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback
Jianli Li, Jiancheng Fang, Min Du, Haifeng Dong
- 发表年份
- 2012
- 引用次数
- 16
关键词
AccelerometerAngular accelerationMicroelectromechanical systemsActuatorTorsion pendulum clockProof massAngular velocityPendulumAngular displacementControl theory (sociology)
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