Current trends in micro‐supercapacitor devices

摘要

Abstract Recently, efforts have been made to design miniaturized energy storage devices according to custom requirements. The application of micro‐electronic equipment has increased significantly in information technology and biotechnology. Microelectromechanical systems, nanoelectromechanical systems, maintenance‐free wireless sensor networks, implantable medical devices, micro‐robots, and integrating energy conversion devices require micropower sources in small dimensions. Conventional supercapacitor devices cannot fulfill such high‐power demand, but miniaturization within the microscale helps enhance the working efficiency due to the shortening of diffusion path length. Micro‐supercapacitors (MSCs) in the micron to centimeter dimension range integrated with circuits and microelectronic components have gained great interest due to their high‐power density, high‐frequency response, and long cycling stability. Research on the design and fabrication of MSCs has progressed enormously. Integrating MSCs with other electronic units helps to achieve a highly efficient self‐powered system. This review presents a critical summary of the recent progress of novel materials for MSCs, fabrication methods, advanced design, and challenges in the MSCs industry.